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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：中国科学院长春光学精密机械与物理研究所
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化
办公地点：机械学院大方楼5021
联系方式：djwudut@dlut.edu.cn 84707625
电子邮箱：djwudut@dlut.edu.cn
基于电子回旋共振-等离子体增强金属有机物化学气相沉积技术生长GaMnN稀磁半导体的研究
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论文类型：期刊论文
发表时间：2022-06-28
发表刊物：物理学报
卷号：57
期号：1
页面范围：508-513
ISSN号：1000-3290
摘要：Diluted magnetic semiconductor film GaMnN was grown on sapphire (alpha-Al2O3) substrate using biscyclopentyldienyl manganese (Cp2Mn) N-2 and TEGa by electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition (ECR-PEMOCVD) The crystal structure and surface topography of the GaMnN films were characterized by RHEED, XRD and AFM. GaMnN films exhibit good (0002) preferred orientation, showing the films are inclined to c-axis growth and retain good wurtzite structure. The surface topography of GaMnN film is composed of many submicron grains piled in the consistent orientation. The magnetism of films is characterized by SQUID. SQUID shows that the film is ferromagnetic, which comes probably only from the ternary phase GaMnN and the Curie temperature of GaMnN film is higher than 350 K. Moreover, higher Mn concentration can enhance the Curie temperature of the film.
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