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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：中国科学院长春光学精密机械与物理研究所
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化
办公地点：机械学院大方楼5021
联系方式：djwudut@dlut.edu.cn 84707625
电子邮箱：djwudut@dlut.edu.cn
Experiments and simulation on laser bending of silicon sheet with different thicknesses
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论文类型：期刊论文
发表时间：2010-11-01
发表刊物：APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
收录刊物：SCIE、EI、Scopus
卷号：101
期号：3,SI
页面范围：517-521
ISSN号：0947-8396
摘要：Based on the requirements for silicon sheets with different thickness in MEMS, and according to the experimental results, the element of the temperature distribution was investigated by calculation with ANSYS, and the bending mechanism of different thicknesses of the silicon sheet is proposed. The results showed that the plastic deformation was delayed as the thickness is increased. The bending angle was bigger with the increment being smaller as the scanning numbers increased, and the biggest bending angle was obtained finally.