论文成果
Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition
  • 点击次数:
  • 发表时间:2022-10-08
  • 发表刊物:Chinese Physics B
  • 所属单位:物理学院
  • 文献类型:J
  • 卷号:21
  • 期号:7
  • ISSN号:1674-1056

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