Release Time:2023-03-30 Hits:
Date of Publication: 2022-10-09
Journal: PRICM 5: The Fifth Pacific Rim International Conference on Advanced Materials and Processing
Institution: 材料科学与工程学院
Volume: 475-479
Issue: V
Page Number: 3959-3962
Prev One:Surface treatment of aluminum by high current pulsed electron beam
Next One:Synthesis and Its Characteristic of Silicon Nitride Film Deposited by ECR-PECVD at Low Temperature