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Structural and mechanical properties of AIN films by pulsed bias arc ion plating

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Date of Publication:2022-10-08

Journal:6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6

Volume:561-565

Issue:PART 2

Page Number:1157-1160

Pre One:Study of the growth behavior of the AlN thin film deposited by RMPECVD

Next One:Structural and mechanical properties of AIN films by pulsed sias arc ion plating
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