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Investigation of mechanical and structural properties of AIN thin films prepared by mid-frequency pulsed magnetron sputtering

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Date of Publication:2022-10-03

Journal:6th Pacific Rim International Conference on Advanced Materials and Processing

Affiliation of Author(s):物理学院

Volume:561-565

Issue:PART 2

Page Number:1185-1188

ISSN No.:0255-5476

Pre One:Influence of boron contents on the structure and hardness properties of Al-Mg-B films by R.F. magnetron sputtering

Next One:Lithium-Ion Storage in Molybdenum Phosphides with Different Crystal Structure
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