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Investigation of mechanical and structural properties of AIN thin films prepared by mid-frequency pulsed magnetron sputtering

Release Time:2023-04-10  Hits:

Date of Publication: 2022-10-03

Journal: 6th Pacific Rim International Conference on Advanced Materials and Processing

Institution: 物理学院

Volume: 561-565

Issue: PART 2

Page Number: 1185-1188

ISSN: 0255-5476

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