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Influence of boron contents on the structure and hardness properties of Al-Mg-B films by R.F. magnetron sputtering

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Date of Publication:2022-10-03

Journal:Rare Matels

Affiliation of Author(s):材料科学与工程学院

Volume:31

Issue:2

Page Number:164-167

Pre One:Influence of boron contents on properties of AlMgB films prepared by RF magnetron sputtering

Next One:Investigation of mechanical and structural properties of AIN thin films prepared by mid-frequency pulsed magnetron sputtering
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