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硅片精密磨削表面损伤形成机理研究

Release Time:2021-12-23  Hits:

Leading Scientist: 鲍岩

Project Participants: Dong Zhigang,Renke Kang

Project Source: 企事业单位委托科技项目

Status: 在研

Supported by: Zhengzhou Abrasives, Tools and Grinding Research Institute Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2020-12-01

Scheduled Completion Time: 2022-12-31

Date of Project Initiation: 2020-12-01

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