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硅片精密磨削表面损伤形成机理研究

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Leading Scientist:鲍岩

Project Participants:Dong Zhigang,Renke Kang

Supported by:企事业单位委托科技项目

Status:在研

Supported by:郑州磨料磨具磨削研究所有限公司

Nature of Project:横向

Date of Project Approval:2020-12-01

Scheduled completion time:2022-12-31

Date of Project Initiation:2020-12-01

Date of Project Completion:2022-12-31

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