Release Time:2019-03-11  Hits:

Indexed by: Journal Article

Date of Publication: 2017-12-15

Journal: JOURNAL OF LIGHTWAVE TECHNOLOGY

Included Journals: Scopus、EI、SCIE

Volume: 35

Issue: 24

Page Number: 5276-5279

ISSN: 0733-8724

Key Words: Acoustic pressure detection; Fabry-Perot; fiber optics sensors

Abstract: We demonstrate a fiber-optic Fabry-Perot acoustic sensor based on a Parylene-C diaphragm of 500 nm in thickness. The excellent diaphragm forming ability and good adhesion of Parylene-C make the sensor fabricate up to 9 mm in diameter. Acoustic testing demonstrates a high dynamic pressure sensitivity of 2239 nm/Pa and a noise limited equivalent acoustic signal level of 22.1 mu Pa/Hz(1/2) at the frequency of 20 Hz. The frequency response exhibits an obvious peak at the frequency of 13 Hz. The sensor can be used for low-frequency acoustic pressure detections, which is necessary in surveillance and security systems.