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Ultrahigh Sensitivity Fiber-Optic Fabry-Perot Interferometric Acoustic Sensor Based on Silicon Cantilever

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Date of Publication:2022-10-03

Journal:IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT

Volume:70

ISSN No.:0018-9456

Key Words:"Cantilever; Fabry-Perot (F-P) interference; fiber-optic acoustic sensor (FOAS); microelectro-mechanical system (MEMS); silicon-on-insulator (SOI) wafer"

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