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A Miniature Fiber-Optic Silicon Cantilever-Based Acoustic Sensor Using Ultra-High Speed Spectrum Demodulation

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Date of Publication:2022-10-04

Journal:IEEE SENSORS JOURNAL

Affiliation of Author(s):光电工程与仪器科学学院

Volume:21

Issue:18

Page Number:20086-20091

ISSN No.:1530-437X

Key Words:"Silicon cantilever; fiber-optic acoustic sensor; silicon-on-insulator; absolute cavity length demodulation"

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