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高功率调制脉冲磁控溅射沉积TiAlSiN纳米复合涂层结构调控与性能研究

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Indexed by:期刊论文

Date of Publication:2015-12-01

Journal:无机材料学报

Included Journals:SCIE、EI、PKU、ISTIC、CSCD、Scopus

Volume:30

Issue:12

Page Number:1254-1260

ISSN No.:1000-324X

Key Words:高功率调制脉冲磁控溅射;TiAlSiN纳米复合涂层;微结构;硬度;磨损

Abstract:采用高功率调制脉冲磁控溅射Al/(Al+Ti)原子比(x)分别为0.25、0.5和0.67的TiAlSi合金靶,溅射功率1~4kW,氮气分压25%,工作气压0.3Pa,在Si(100)和AISI304奥氏体不锈钢基片上沉积了TiAlSiN纳米复合涂层。TiAlSiN涂层中氮含量保持在52.0at%~56.7at%之间,均形成了nc-TiAlN/a-Si3N4/AlN纳米晶/非晶复合结构。随着原子比x增加,非晶含量增加,涂层硬度先升高而后降低。当x=0.5时,硬度最高可达28.7GPa。溅射功率升高可提高溅射等离子体中金属离化程度,促进涂层调幅分解的进行,形成了界面清晰的非晶包裹纳米晶结构,且晶粒尺寸基本保持不变。当x=0.67时,溅射功率由1kW上升到4kW时,硬度由16.4GPa升至21.3GPa。不同靶材成分和溅射功率条件下沉积的TiAlSiN涂层的磨损率为(0.13~6.25)×10-5mm3/(N·m),具有优良的耐磨性能。当x=0.67,溅射功率2kW时,nc-TiAlN/a-Si3N4纳米复合涂层具有最优的耐磨性能。

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