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Indexed by:Journal Papers

Date of Publication:2015-07-01

Journal:VACUUM

Included Journals:EI、SCIE、ISTIC、Scopus

Volume:117

Page Number:23-26

ISSN No.:0042-207X

Key Words:TiC/WC mutlilayer; Magnetron sputtering; Coherent growth; Superhardness effect

Abstract:TiC/WC nanomultilayers were prepared by multi-target magnetron sputtering device. The dependence of microstructure evolution and mechanical properties has been investigated. The results showed that "mutual growth effect" and "superhardness effect" were observed in the multilayers. The polytypic WC monolayer exhibited with both triclinic alpha-WC and cubic beta-WC structure for the carbon loss in the sputtering process. When alternately deposited with TiC layers, TiC/WC nanomultilayer would grow coherently with each other when WC layer thickness was less than 1 nm. The multilayer exhibited with cubic structure, and it would achieve 41.5 GPa when WC layer was 0.5 nm. Further increasing WC layer thickness, the hardness would drop down quickly accompanied with the disruption of coherent growth structure, and the multilayers gradually turned to exhibit polytypic structure. (C) 2015 Elsevier Ltd. All rights reserved.