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论文类型：期刊论文

发表时间：2009-08-01

发表刊物：ADVANCED ENGINEERING MATERIALS

收录刊物：SCIE、EI、Scopus

卷号：11

期号：8

页面范围：667-673

ISSN号：1438-1656

摘要：Characterizations of magnetron sputtered CrSiN/ZrN multilayer coatings from structure to tribological behaviors were reported. Si wafers and round AISI M2 steel specimens were used as substrates, and were mechanically grounded and polished. Afterward, the substrates were cleaned in acetone, placed in an ultrasonic bath for degreasing, and then rinsed in ethanol and dc-ionized water. CrSiN, ZrN monolayers, and CrSiN /ZrN muitilayer coatings were deposited at room temperature using a conventional direct current (DC) magnetron sputtering unit. A 2mm deposition of CrSi thin film was used as the adhesion layer of CrSiN monolayer. The layered structure of CrSiN/ZrN multilayers was fabricated by turning the substrate holder platform and exposing the samples alternately to Zr or Cr(Si) targets. The wear tracks of the coating surfaces and the counterpart surfaces were examined after the pin-on-disk tests. It was found that significant wear scar appeared on the counter ball surface whereas the coating surfaces showed little wear scar.