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论文类型：期刊论文

发表时间：2009-07-01

发表刊物：JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

收录刊物：SCIE、EI

卷号：27

期号：4

页面范围：672-680

ISSN号：0734-2101

关键字：amorphous state; chromium compounds; coatings; elastic moduli; Fourier transform spectra; hardness; infrared spectra; multilayers; nanocomposites; nanoindentation; plastic deformation; scanning electron microscopy; silicon compounds; sputter deposition; transmission electron microscopy; X-ray diffraction; zirconium compounds

摘要：Nanocrystalline/amorphous CrN/ZrSiN multilayer coatings with a bilayer thickness ranging from 11 to 153 nm were prepared by reactive magnetron sputtering technique. The microstructure and mechanical properties of these thin films were characterized by x-ray diffraction (XRD), scanning electron microscopy, transmission electron microscopy (TEM), Fourier transform infrared spectroscopy (FTIR), and nanoindentation. The formation of nanocrystalline CrN and nanocomposite ZiSiN in the single layer coatings was identified by XRD and FTIR. The periodic structure of the as-deposited multilayer coatings was confirmed by TEM observation. Nanoindentation tests showed that both the values of hardness (H) and reduced elastic modulus (E(r)) of CrN/ZrSiN multilayers remained almost constant despite varying the bilayer thickness. The multilayer coatings exhibited higher H of 30 GPa and higher resistance to plastic deformation when compared to the single layer CrN and ZrSiN coatings.