大连理工大学主页平台管理系统高飞--高飞-- Experimental and numerical investigations on time-resolved characteristics of pulsed inductively coupled O2/Ar plasmas

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Experimental and numerical investigations on time-resolved characteristics of pulsed inductively coupled O2/Ar plasmas

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论文类型：期刊论文

发表时间：2017-01-01

发表刊物：Journal of Vacuum Science & Technology A

卷号：35

期号：2

页面范围：21301-21301

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