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    高飞

    • 教授     博士生导师 硕士生导师
    • 主要任职:集成电路学院党委书记
    • 性别:男
    • 毕业院校:大连理工大学
    • 学位:博士
    • 所在单位:集成电路学院
    • 学科:等离子体物理
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    A comparative study of emissive probe techniques for vacuum space potential measurements

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      发布时间:2019-03-12

      论文类型:期刊论文

      发表时间:2018-09-01

      发表刊物:VACUUM

      收录刊物:SCIE

      卷号:155

      页面范围:566-571

      ISSN号:0042-207X

      关键字:Vacuum space potentials; Emissive probes; Inflection point; Floating point

      摘要:The major emissive probe techniques for the measurement of vacuum space potentials are compared to find the best emissive probe method in a vacuum. An overview of the inflection point method, the floating point method, and the vacuum current bias method is given, addressing how each method works in a vacuum. A comparison of the experimental data measured in a vacuum shows that the improved inflection point method has a best accuracy of 0.1 V in vacuum space potential measurements, while the original inflection point method can yield about half of a volt below the real space potential due to the inappropriate linear fitting in the method. Although the floating point method and the vacuum current bias method are convenient and rapid measurement techniques, the floating point method can only measure the vacuum potentials more than 1 V, and the space charge effect is not considered in the vacuum current bias method.