Parylene-C diaphragm-based low-frequency photoacoustic sensor for space-limited trace gas detection

Date：2024-03-05  Hits:

Journal:OPTICS AND LASERS IN ENGINEERING

Affiliation of Author(s):光电工程与仪器科学学院

Volume:134

ISSN No.:0143-8166

Date of Publication:2022-10-07

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