Parylene-C diaphragm-based fiberoptic gas sensor based on photoacoustic spectroscopy

Date：2024-03-05  Hits:

Journal:2019 International Conference on Optical Instruments and Technology

Affiliation of Author(s):光电工程与仪器科学学院

Volume:11438

Page Number:1143803-

Date of Publication:2022-10-07

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