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Indexed by:期刊论文
Date of Publication:2013-03-01
Journal:CHINESE PHYSICS LETTERS
Included Journals:SCIE、ISTIC、Scopus
Volume:30
Issue:3
ISSN No.:0256-307X
Abstract:The characteristics of radio frequency atmospheric pressure discharge in nitrogen and oxygen mixture gases are investigated by using a one-dimensional fluid model. The model consists of equations of particle continuity, Poisson's equation, and the electron energy equation. The effect of the concentrations of O-2 in N-2 on the discharge characteristics is analyzed. The results show that when the concentration of O-2 in N-2 is less than 12%, as the amount of O-2 grows, the electron density and the N-4(+) ion density decrease; the main negative particles are electrons. When the concentration of O-2 in N-2 is greater than 12%, the electron density and the N-4(+) ion density increase with the increasing admixture of oxygen; the main negative particle is the O-ion. Moreover, the O- ion density, the O-2(+) ion density, the electron temperature and the mixture gases electronegativity increase with growth of O-2 in the range from 4% to 20% and with density of O-2 in N-2.