Release Time:2019-03-09  Hits:

Indexed by: Journal Article

Date of Publication: 2011-01-15

Journal: APPLIED SURFACE SCIENCE

Included Journals: EI、SCIE

Volume: 257

Issue: 7

Page Number: 2683-2688

ISSN: 0169-4332

Key Words: Multilayer films; Pulse biased arc ion plating; Hardness; Adhesion

Abstract: In this work, the effect of modulation period (A) on Ti/TiN multilayer films deposited on high-speed-steel (HSS) substrates using pulse biased arc ion plating is reported. The crystallography structures and crosssectional morphology of Ti/TiN multilayer films were characterized by X-ray diffraction analysis (XRD) and scanning electron microscopy (SEM), respectively. Their mechanical properties were determined via nanoindentation measurements, while the film/substrate adhesion via the scratch test. It was found that the highest hardness value reached 43 GPa for the modulation period of 54 nm, while the film/substrate adhesion also reached the highest value of 83 N. Furthermore, the hardness enhancement mechanism in the multilayer films is discussed. (C) 2010 Elsevier B.V. All rights reserved.