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Indexed by:期刊论文

Date of Publication:2009-11-01

Journal:JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Included Journals:SCIE、EI、Scopus

Volume:27

Issue:6

Page Number:1360-1364

ISSN No.:0734-2101

Abstract:ZrN doped diamondlike carbon composite films with different compositions were deposited on cemented carbide substrates at different nitrogen flow rates by pulsed bias arc ion plating. Scanning electron microscopy results show that the film surfaces were all uniform, smooth, and dense. X-ray photoelectron spectroscopy reveal the C contents are more than 60%, the N content increases, and the Zr content decreases with increasing nitrogen flow rate. The Raman spectra indicated that the deposited films were diamondlike carbon. X-ray diffraction results suggested that a ZrN crystalline phase was also present in the films. The hardness and elastic modulus were closely related to the composition and structure of the films and decrease with increasing nitrogen flow rates, principally due to the increase in the sp(2) content and the decrease in the ZrN crystalline phase. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3248274]