个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 大连理工大学常州研究院院长(2012-2016)
性别:男
毕业院校:大连理工大学
学位:博士
所在单位:材料科学与工程学院
学科:材料物理与化学. 材料表面工程. 等离子体物理
办公地点:三束材料改性教育部重点实验室2号楼(老三束北楼)301室
联系方式:Tel:0411-84708380-8301 Emil:gqlin@dlut.edu.cn
电子邮箱:gqlin@dlut.edu.cn
Mechanical and optical properties of composite TiOxNy films prepared by pulsed bias arc ion plating
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论文类型:期刊论文
发表时间:2009-05-01
发表刊物:1st International Symposium on Hybrid Materials and Processing (HyMaP 2008)
收录刊物:SCIE、EI、CPCI-S
卷号:9
期号:,SI
页面范围:S174-S178
ISSN号:1567-1739
关键字:Titanium oxynitride coating; Arc ion plating; Pulsed bias; Optical property; Mechanical property
摘要:Composite TiOxNy films were synthesized with pulsed bias arc ion plating from two Ti target evaporators in a gaseous mixture of At, N-2 and O-2. With the substrate bias varying from 0 to -700 V, the structural, compositional, mechanical and optical properties of the films were characterized with X-ray diffractometry (XRD), X-ray photoelectron spectroscopy (XPS), wear tests and UV-VIS absorption spectra. XRD and XPS results show that deposited at a substrate bias of -100 V, the film crystallized in a mixture of Anatase and Rutile TiO2 phases with 0 locations partly substituted by N atoms. The threshold wavelength of optical absorption shifts from 367 to 400 nm after N doped, which is related with band gap narrowing cased by N doping. The wear tests indicate that friction efficient first decreases, then increases as the substrate bias goes up. The films deposited at a bias of -300 V exhibit the lowest friction efficient, less than 0.15. For the films on steel substrates, the TiOxNy films deposited at -300 and -500 V exhibit the highest adhesion strength and nano-hardness, respectively. (C) 2009 Elsevier B.V. All rights reserved.