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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 大连理工大学常州研究院院长（2012-2016）
性别：男
毕业院校：大连理工大学
学位：博士
所在单位：材料科学与工程学院
学科：材料物理与化学. 材料表面工程. 等离子体物理
办公地点：三束材料改性教育部重点实验室2号楼（老三束北楼）301室
联系方式：Tel:0411-84708380-8301 Emil:gqlin@dlut.edu.cn
电子邮箱：gqlin@dlut.edu.cn
Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure
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论文类型：期刊论文
发表时间：2012-12-01
发表刊物：JOURNAL OF PLASMA PHYSICS
收录刊物：Scopus、SCIE、EI
卷号：78
期号：6
页面范围：673-676
ISSN号：0022-3778
摘要：A one-dimensional fluid model is built to study the effect of radio frequency (RF) on the characteristics of RF nitrogen discharge with induced argon plasma at high pressure. The model is solved by a finite difference method, and the numerical results are obtained. The numerical results show that by modulating driven frequency, the discharge can obtain higher plasma density. Moreover, the discharge is operated in a stable a mode in a range of 100 MHz of driven frequency.