|
个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 大连理工大学常州研究院院长（2012-2016）
性别：男
毕业院校：大连理工大学
学位：博士
所在单位：材料科学与工程学院
学科：材料物理与化学. 材料表面工程. 等离子体物理
办公地点：三束材料改性教育部重点实验室2号楼（老三束北楼）301室
联系方式：Tel:0411-84708380-8301 Emil:gqlin@dlut.edu.cn
电子邮箱：gqlin@dlut.edu.cn
Ti/TiN multilayer thin films deposited by pulse biased arc ion plating
点击次数：
论文类型：期刊论文
发表时间：2011-01-15
发表刊物：APPLIED SURFACE SCIENCE
收录刊物：SCIE、EI
卷号：257
期号：7
页面范围：2683-2688
ISSN号：0169-4332
关键字：Multilayer films; Pulse biased arc ion plating; Hardness; Adhesion
摘要：In this work, the effect of modulation period (A) on Ti/TiN multilayer films deposited on high-speed-steel (HSS) substrates using pulse biased arc ion plating is reported. The crystallography structures and crosssectional morphology of Ti/TiN multilayer films were characterized by X-ray diffraction analysis (XRD) and scanning electron microscopy (SEM), respectively. Their mechanical properties were determined via nanoindentation measurements, while the film/substrate adhesion via the scratch test. It was found that the highest hardness value reached 43 GPa for the modulation period of 54 nm, while the film/substrate adhesion also reached the highest value of 83 N. Furthermore, the hardness enhancement mechanism in the multilayer films is discussed. (C) 2010 Elsevier B.V. All rights reserved.