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论文类型：期刊论文

发表时间：2008-09-15

发表刊物：APPLIED SURFACE SCIENCE

收录刊物：SCIE、EI、Scopus

卷号：254

期号：22

页面范围：7149-7154

ISSN号：0169-4332

关键字：arc ion plating; pulsed bias; (Cr, Al)N films; high-temperature oxidation resistance

摘要：(Cr, Al) N films were deposited by pulsed bias arc ion plating on HSS and 316L stainless steel substrates. With pulsed substrate bias ranging from -100 V to -500 V, the effect of pulsed bias on film composition, phase structure, deposition rate and mechanical properties was investigated by EDX, XRD, SEM, nanoindentation and scratch measurements. The high-temperature (up to 900 degrees C) oxidation resistance of the films was also evaluated. The results show that Al contents and deposition rates decrease with increasing pulsed bias and the ratio of (Cr + Al)/N is almost constant at 0.95. The as-deposited (Cr, Al) N films crystallize in the pseudo-binary (Cr, Al) N and Al phases. The film hardness increases with increasing bias and reaches the maximum 21.5 GPa at -500 V. The films deposited at -500 V exhibit a high adhesion force, about 70 N, and more interestingly good oxidation resistance when annealed in air at 900 degrees C for 10 h. (C) 2008 Elsevier B.V. All rights reserved.