Experimental study on micro-deliquescence ultra-precision polishing with fine water mist for KDP crystal
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论文类型:期刊论文
发表时间:2013-09-23
发表刊物:Advanced Materials Research
收录刊物:Scopus、CPCI-S、EI
卷号:797
页面范围:423-427
ISSN号:9783037858257
关键字:KDP Crystal; Deliquescence; Surface quality; Polishing
摘要:KDP crystal (Potassium dihydrogen phosphate single crystal) is extremely difficult to obtain flawless surface because of its soft, brittle, and hygroscopic. And a large amount of time has been spend on obtaining flawless surface with ultra-precision machining methods. In order to quickly reduce surface roughness on KDP crystal, a new micro-deliquescence polishing method with fine water mist was proposed, the polishing tool with fine water mist was designed, and the polishing experiment was carried out. The micro-deliquescence polishing with fine water mist can improve the surface quality of KDP crystal quickly, so it is an effective preprocessing before ultra-precision machining.
