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论文类型：期刊论文

发表时间：2013-09-23

发表刊物：Advanced Materials Research

收录刊物：EI、CPCI-S、Scopus

卷号：797

页面范围：423-427

ISSN号：9783037858257

关键字：KDP Crystal; Deliquescence; Surface quality; Polishing

摘要：KDP crystal (Potassium dihydrogen phosphate single crystal) is extremely difficult to obtain flawless surface because of its soft, brittle, and hygroscopic. And a large amount of time has been spend on obtaining flawless surface with ultra-precision machining methods. In order to quickly reduce surface roughness on KDP crystal, a new micro-deliquescence polishing method with fine water mist was proposed, the polishing tool with fine water mist was designed, and the polishing experiment was carried out. The micro-deliquescence polishing with fine water mist can improve the surface quality of KDP crystal quickly, so it is an effective preprocessing before ultra-precision machining.