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论文类型：期刊论文

发表时间：2016-07-01

发表刊物：INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

收录刊物：SCIE、EI、Scopus

卷号：85

期号：5-8

页面范围：1347-1360

ISSN号：0268-3768

关键字：KDP single crystals; Micro-waviness; Water dissolution; Material removal; Surface roughness

摘要：Single crystals of potassium dihydrogen phosphate (KDP) are an irreplaceable optical material in laser-induced inertial confinement fusion (ICF), where they are used as electro-optic switches and for laser-frequency conversion. The KDP lenses used in ICF applications must be pristine, high quality, and have a surface roughness of less than 3 nm. Currently, single-point diamond turning (SPDT) is the primary method for performing ultra-precision machining on KDP crystals. However, after the SPDT process, the crystal surface exhibits micro-waviness and subsurface damage, both of which have adverse effects on the optical performance of the KDP elements, especially the laser-induced damage threshold. In this study, a new method of micro-dissolution polishing was developed, which is based on the solubility of KDP crystals in water, to achieve controllable material removal. A material removal function was formulated to describe the material removal in terms of both the path and parameters used to polish the SPDT-machined samples with a small polishing tool. An experimental study showed that this method is able to reduce the surface micro-waviness and surface roughness (from 6.205 to 2.107 nm) significantly. The method is also applicable to the polishing of other water-soluble materials.