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论文类型：期刊论文

发表时间：2020-03-01

发表刊物：APPLIED SURFACE SCIENCE

收录刊物：EI、SCIE

卷号：505

ISSN号：0169-4332

关键字：Quartz glass; CMP; ReaxFF MD; Removal mechanism; Aqueous H2O2; Pressure

摘要：Reactive force field molecular dynamics (ReaxFF MD) simulation was employed to study the interfacial interaction during the Chemical mechanical polishing (CMP) process of quartz glass. Results indicated that dissociation and adsorption of H2O occurred on the quartz glass surface in pure H2O, and the dissociation of H2O could hydroxylate quartz glass surface to form Si-OH bonds. In addition, it was found that the surface hydroxylation degree is higher in aqueous H2O2. The formation of Si-O-Si bonds plays a key role in the CMP process. Dehydrogenation and dehydroxylation are two ways to form interface bridge bonds. The interface bridge bonds between abrasive and substrate could transmit mechanical force with the movement of abrasive. Interface pressure affects the number and forms of atoms removed. With the increment of pressure, the removal form gradually changes from single removal mode to chain removal mode. The effect of aqueous H2O2 on the removal process was also studied by adding different amount of OH group on the quartz glass surface. This work helps us reveal the removal mechanism in the CMP process of quartz glass from an atomic perspective.