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论文类型：期刊论文

发表时间：2012-07-01

发表刊物：SCRIPTA MATERIALIA

收录刊物：SCIE、EI、Scopus

卷号：67

期号：2

页面范围：197-200

ISSN号：1359-6462

关键字：Nanometer chip; Ultrafine grit; TEM; HgCdTe; Nanogrinding

摘要：Face nanogrinding was conducted on HgCdTe films using a novel ultrafine diamond wheel that we have developed. Damage-free subsurface was achieved after direct face nanogrinding. Two undeformed nanometer chips with rectangular cross-section were observed. The chip thickness varies from 25 to 28 nm, corresponding to a chip width/thickness ratio ranging from 3.2 to 3.4. A novel model of maximum undeformed chip thickness for face grinding was constructed, and the calculated results are consistent with those found experimentally. (C) 2012 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.