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Why Parallelism of Workpieces Becomes Convergent During Double-Sided Lapping?
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Journal:JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME

Volume:145

Issue:7

ISSN No.:1087-1357

Key Words:2-BODY; DAMAGE; KINEMATIC ANALYSIS; MATERIAL REMOVAL; MECHANISM; PAD; SUBSTRATE

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Senior Engineer
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Male

Alma Mater:The University of Tokyo

Degree:Doctoral Degree

School/Department:Department of Mechanical Engineering

Discipline:Mechanical Manufacture and Automation

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