Date of Publication:2022-10-03
Journal:INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING
Affiliation of Author(s):机械工程学院
Volume:3
Issue:2
ISSN No.:2631-8644
Key Words:"chemical mechanical polishing; W-Ni-Fe alloy; grain boundary step; modelling; mechanism"
Senior Engineer
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender:Male
Alma Mater:The University of Tokyo
Degree:Doctoral Degree
School/Department:Department of Mechanical Engineering
Discipline:Mechanical Manufacture and Automation
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