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The effect of the interface reaction mode on chemical mechanical polishing
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Date of Publication:2022-10-03

Journal:CIRP Journal of Manufacturing Science and Technology

Volume:31

Page Number:539-547

ISSN No.:1755-5817

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Senior Engineer
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Male

Alma Mater:The University of Tokyo

Degree:Doctoral Degree

School/Department:Department of Mechanical Engineering

Discipline:Mechanical Manufacture and Automation

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