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Design of a motorised plasma delivery system for ultra-precision large optical fabrication
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Date of Publication:2022-10-02

Journal:INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING

Affiliation of Author(s):化工学院

Volume:2

Issue:4

ISSN No.:2631-8644

Key Words:"plasma figuring; inductively coupled plasma; RF network; plasma delivery system"

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Senior Engineer
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Male

Alma Mater:The University of Tokyo

Degree:Doctoral Degree

School/Department:Department of Mechanical Engineering

Discipline:Mechanical Manufacture and Automation

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