Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems
Release Time:2025-04-27 Hits:
Indexed by: Journal Papers
Document Code: 384999
Date of Publication: 2024-04-10
Journal: ADVANCED MATERIALS
Volume: 36
Issue: 15
ISSN: 0935-9648
Key Words: DEPOSITION; DISSOLUTION; HIGH-PERFORMANCE; MECHANICAL-PROPERTIES; NITRIDE