Hits:
Indexed by:会议论文
Date of Publication:2011-09-15
Page Number:1-1
Pre One:Diagnostics of Parameters by Optical Emission Spectroscopy and Langmuir Probe in Mixtures (SiH4/C2H4/Ar) Radio-Frequency Discharge
Next One:Dust Particle Density and Charges in Radio-Frequency Mixture Discharge Plasma
