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超灵敏MEMS弱力传感器设计加工及测试验证

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Leading Scientist:赵剑

Project Participants:liupengbo

Supported by:国家科技部

Status:在研

Supported by:西安交通大学

Nature of Project:纵向

Project Approval Number:2022YFB3203600

Date of Project Approval:2022-12-01

Scheduled completion time:2025-11-30

Date of Project Initiation:2022-12-01

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