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Design and modeling of a MEMS accelerometer based on couple d mode-localize d nonlinear resonators under electrostatic actuation

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Date of Publication:2022-10-06

Journal:COMMUNICATIONS IN NONLINEAR SCIENCE AND NUMERICAL SIMULATION

Volume:103

ISSN No.:1007-5704

Key Words:"Mode localization; Accelerometer; Electrostatic coupling; Nonlinear dynamics; Multiple scales method"

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