Design and modeling of a MEMS accelerometer based on couple d mode-localize d nonlinear resonators under electrostatic actuation
Release Time:2022-10-06 Hits:
Date of Publication: 2022-10-06
Journal: COMMUNICATIONS IN NONLINEAR SCIENCE AND NUMERICAL SIMULATION
Volume: 103
ISSN: 1007-5704
Key Words: "Mode localization; Accelerometer; Electrostatic coupling; Nonlinear dynamics; Multiple scales method"