Computational investigation of high-order mode localization in electrostatically coupled microbeams with distributed electrodes for high sensitivity mass sensing
Release Time:2022-10-06 Hits:
Date of Publication: 2022-10-05
Journal: MECHANICAL SYSTEMS AND SIGNAL PROCESSING
Volume: 158
ISSN: 0888-3270
Key Words: "Mass sensor; Mode localization; Higher-order; Distributed electrodes"