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一种基于槽型悬臂梁结构的微质量传感器

Release Time:2019-03-09  Hits:

First Author: 高仁璟

Disigner of the Invention: 黄毓,Shutian Liu,赵剑

Application Number: CN201120157779.X

Authorization Date: 2011-05-18

Authorization Number: CN202057398U

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