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  • 梁红伟 ( 教授 )

    的个人主页 http://faculty.dlut.edu.cn/kid/zh_CN/index.htm

  •   教授   博士生导师   硕士生导师
  • 主要任职:集成电路学院院长
论文成果 当前位置: 中文主页 >> 科学研究 >> 论文成果
Growth of ZnO films under different oxygen partial pressures by metal organic chemical vapour deposition

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论文类型:会议论文
发表时间:2009-08-02
收录刊物:EI、CPCI-S、Scopus
卷号:428-429
页面范围:458-+
关键字:Ba ZnO; Thin Films; Growth; Glass; MOCVD
摘要:ZnO films were grown under different oxygen partial pressures by metal organic chemical vapor deposition on the substrates of Corning glass. We investigated the quality of the films by SIEMENS D8 X-ray diffractometer. The surface morphology of the films were observed by Digital Nanoscope IIIa AFM with normal silicon nitride tip in the contact mode. The hall effect measurements were carried out with indium ohmic contact. The transmission spectrum of the films were measured. The transmission ratio is larger than 80% in the region above the wavelength of 385nm, and sharply decreased under 10% below the wavelength of 375 nm.

 

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