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论文类型：期刊论文

发表时间：2014-06-01

发表刊物：IEEE TRANSACTIONS ON PLASMA SCIENCE

收录刊物：SCIE、EI

卷号：42

期号：6

页面范围：1648-1653

ISSN号：0093-3813

关键字：Atmospheric pressure; optical emission spectroscopy (OES); plasma discharge; radio frequency (RF)

摘要：A developed atmospheric-pressure capacitive discharge source driven by radio-frequency power supply at 13.56 MHz is capable of producing a homogeneous and cold glow discharge in N-2/Ar. The measurements of its electrical parameters are made systematically with respect to the nitrogen component when diluted into argon plasma discharge at various concentration ratio, and the variation tendencies of the atomic nitrogen and the N-2(C-3 Pi u) states with the concentration ratio of nitrogen to argon are investigated by means of optical emission spectroscopy. It is shown that although the admixture of nitrogen into argon plasma changes the electric characteristics greatly, the vibrational distribution function alters slightly at the same mixture ratio, and the production of N-atom is proportional to the nitrogen component.