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论文类型：期刊论文

发表时间：2014-06-01

发表刊物：IEEE TRANSACTIONS ON PLASMA SCIENCE

收录刊物：SCIE、EI、Scopus

卷号：42

期号：6

页面范围：1654-1660

ISSN号：0093-3813

关键字：Coaxial transmission line; microplasma discharge; radio frequency (RF); resonance frequency

摘要：In this paper, it is found that the coaxial transmission line between the matching box and the plasma reactor plays an important role in impedance matching of atmospheric-pressure radio-frequency capacitively coupled microplasma discharge characterized by very low capacitance value. The high output voltage across reactor terminal is generated when the external circuit is operating in resonant state driven by power supply. The experimental results show that coaxial transmission line exhibits capacitive characteristics within the working frequency range and its capacitance increases linearly with the length of the transmission lines; the resonant frequency and voltage across the terminal reactor decrease with the length of coaxial transmission line.