大连理工大学主页平台管理系统 Jining Sun Investigation of speed and temperature effects in mechanical nano-patterning of GaAs via molecular dynamics simulation Home

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Effect of Refresh Time on XeF2 Gas-assisted FIB Milling of GaAs

2024-04-01 Hits:

Journal:Nanomanufacturing and Metrology

Volume:6

Issue:1

ISSN:2520-811X

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Jining Sun

Gender:Male Alma Mater:Heriot-Watt University Degree:Doctoral Degree School/Department:Dalian University of Technology Business Address:Room 6013
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Effect of Refresh Time on XeF2 Gas-assisted FIB Milling of GaAs