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Investigation of speed and temperature effects in mechanical nano-patterning of GaAs via molecular dynamics simulation
2024-06-11 Hits:Date of Publication:2024-01-01
Journal:Materials Today Communications
Volume:40
ISSN:2352-4928
Key Words:Deformation behavior; Dynamics simulation; Gallium arsenide; III-V semiconductors; Maximum forces; Mechanical; Nano-imprinting; Nano pattern; NanoPatterning; Patterning process; Piles; Pile-ups; Pressung; Residual stresses; Semiconducting gallium; Temperature
Jining Sun
Gender:Male
Alma Mater:Heriot-Watt University
Degree:Doctoral Degree
School/Department:Dalian University of Technology
Business Address:Room 6013
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