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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 《Plasma Science and Technology》学术期刊编委
性别：男
毕业院校：大连工学院
学位：硕士
所在单位：物理学院
学科：等离子体物理
办公地点：主楼东侧楼（物理系楼）304室
联系方式：0411-84707981
电子邮箱：wangdez@dlut.edu.cn
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MODEL OF COLLISIONAL SHEATH EVOLUTION IN PLASMA SOURCE ION-IMPLANTATION
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论文类型：期刊论文
发表时间：1993-08-15
发表刊物：JOURNAL OF APPLIED PHYSICS
收录刊物：SCIE、Scopus
卷号：74
期号：4
页面范围：2986-2988
ISSN号：0021-8979
摘要：A model is developed to study the temporal evolution of the sheath during a pulse of high negative voltage applied to a target immersed in a plasma, such as that present in plasma source ion implantation. This model covers the whole range from collision free to collision dominated sheaths. The sheath expansion velocity and the position of the sheath edge as a function of time in planar geometries for various pressures are obtained.