点击次数：

论文类型：期刊论文

发表时间：2003-09-01

发表刊物：IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

收录刊物：SCIE、PubMed

卷号：50

期号：9

页面范围：1100-1104

ISSN号：0885-3010

摘要：This paper presents a new piezoelectric micromotor based on the structure of serial bending arms. Serial bending arms are composed of two piezoelectric bimorphs with one end fixed and the other end free, driven by two signals of a biased square wave with a phase difference of pi/2. The free end of a cantilever arm will move along an elliptic orbit so that the cantilever is used to drive a cylinder rotor. The rotor's end surface contacts the free end of the cantilever, resulting in the rotor's rotation. There are six serial bending arms anchored on the base. The driving mechanism of the micromotor is proposed and analyzed. A new micromotor prototype, 5 mm in diameter, has been fabricated and characterized. The maximum rotational speed reaches 325 rpm, and the output torque is about 36.5 muNm.