Mengxi Wu

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基于胶膜转印的气动微阀及微流控芯片
Release Time:2024-11-13  Hits:

Indexed by:Journal Papers
Document Code:404098
Date of Publication:2024-06-13
Journal:微纳电子技术
Volume:61
Issue:10
Page Number:106-113
ISSN:1671-4776
Key Words:adhesive bonding; microfluidic chip; pneumatic microvalve; polymethylmethacrylate(PMMA); transfer printing
CN:13-1314/TN