Paper Publications
用于海洋三维温度场监测的MEMS温压一体式传感器
2024-11-15 Hits:
Date of Publication:2024-11-15
Journal:微纳电子技术
Volume:61
Issue:10
Page Number:91-99
ISSN No.:1671-4776
Key Words:压力传感器; 多传感信号解耦; 微机电系统(MEMS)传感器; 海洋环境检测; 温度传感器
CN No.:13-1314/TN
Date of Publication:2024-11-15
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