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用于海洋三维温度场监测的MEMS温压一体式传感器
Release Time:2024-11-18  Hits:

Indexed by:Journal Papers
Document Code:411980
Date of Publication:2024-06-14
Journal:微纳电子技术
Volume:61
Issue:10
Page Number:97-105
ISSN:1671-4776
Key Words:marine environment detection; micro-electromechanical system(MEMS) sensor; multiple sensing signal decoupling; pressure sensor; temperature sensor
CN:13-1314/TN

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