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发表时间:2022-10-03
发表刊物:MEASUREMENT
卷号:134
页面范围:118-122
ISSN号:0263-2241
上一条:The effect of N2 flow rate on discharge characteristics of microwave electron cyclotron resonance plasma
下一条:Investigation of temperature-dependent ferroelectric Properties of Y-doped HfO2 thin film prepared by middle-frequency reactive magnetron co-sputtering